CHEMICAL SUPPLYING EQUIPMENT

摘要

An apparatus for supplying chemicals is provided to avoid generation of a temperature difference between chemical solutions stored in a chemical storage tank by making a heated chemical solution and a cooled chemical solution uniformly discharge at the bottom of a chemical storage tank when the chemical solutions are applied to the chemical storage tank. A chemical storage tank(100) includes a dip tube(112) for uniformly discharging a chemical solution so that the chemical solution is uniformly mixed when the chemical solution is supplied from the outside, storing the chemical solution. A pump(102) pumps the chemical solution stored in the chemical storage tank. A filter(104) filters the chemical solution pumped from the pump to eliminate foreign substance. After the foreign substance is removed by the filter, a fed-back chemical solution is heated to a predetermined temperature by a heater(106). A heat exchanging unit(108) cools the chemical solution heated by the heater by PCW(process cooling water) and supplies the cooled chemical solution to the chemical storage tank. A chemical supply pipe(110) forms a path for supplying the chemical from which the foreign substance is removed to equipment. The dip tube can be fixed to an inner sidewall of the chemical storage tank, installed as a fork shape on the inner bottom of the chemical storage tank.