| 摘要 |
A liquid supply apparatus is provided to reduce the space occupied by the apparatus with reduced number of tanks by allowing storage and heating of liquid within first and second tanks. A liquid supply apparatus(100) comprises first and second tanks(10,20), a first supply pipe(50a), a second supply pipe(50b), and a circulation pipe. The first and second tanks supply liquid to a substrate processing apparatus(60). The first supply pipe connects the first tank and substrate processing apparatus. The second supply pipe connects the second tank and substrate processing apparatus. The circulation pipe connects the first and second tanks with each other, comprising first circulation pipe(30) through which liquid is supplied from the second tank to first tank, and second circulation pipe(40) through which liquid is supplied from the first tank to second tank.
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