发明名称 GAUSS SCANNER AND METHOD USING THE SAME
摘要 A magnetic circuit measuring device and a magnetic circuit measuring method using the same are provided to obtain a precise measurement result by measuring the whole range of a magnetic circuit and to shorten the measuring time by measuring the position and size of the magnetic circuit and a Gauss value at the same time. In a magnetic circuit measuring device, a stage(100) places a magnetic circuit(600). A horizontally and vertically moving unit(700) is installed on the stage and moved on the stage in the directions of X, Y, and Z axes. A laser displacement sensor is installed at the horizontally and vertically moving unit to measure the position and size of the magnetic circuit. A three-axis measuring Gauss meter measures the magnetic flux density and a magnetic field generated in the magnetic circuit in the directions of vectors of X, Y, and Z axes.
申请公布号 KR100840154(B1) 申请公布日期 2008.06.23
申请号 KR20070020402 申请日期 2007.02.28
申请人 ULVAC KOREA 发明人 GONG, SUNG KWAN;CHOI, PAN KYU;LEE, TAE KWANG
分类号 G01R33/12 主分类号 G01R33/12
代理机构 代理人
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