| 摘要 |
An apparatus of processing leak in wet process equipment is provided to remarkably improve leak process efficiency of a chemical supply zone by automatically detecting the generation of leak and by processing leakage liquid. Leak liquid generated from a chemical supply zone(100) is collected and transferred by an emergency line(110). An automatic valve(120) controls the opening/closing of the emergency line, installed in the emergency line. A detection sensor(130) detects the generation of leakage liquid of the chemical supply zone. A control part(140) controls the automatic valve according as the detection sensor detects the leakage liquid. The chemical supply zone can include an exhaust line(310) for exhausting the chemicals sued in a wet process zone wherein the emergency line joins the exhaust line.
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