| 摘要 |
An apparatus of cooling chemical solution in wet process equipment is provided to shorten an interval of work time necessary for exhausting chemicals by rapidly cooling the chemicals introduced into a storage part by a water-cooling method and an air-cooling process. A storage part(110) includes an introduction port(111) for receiving high-temperature chemicals exhausted from a bath and an exhaust port(112) for exhausting cooled chemicals of a predetermined temperature. A first cooling member(200) cools the chemicals in the storage part by a water-cooling method. A second cooling member(300) makes cool the chemicals in the storage part by an air-cooling method. The storage part can include a cover(120) for sealing the open upper surface of the storage part. The second cooling member can include a nozzle for injecting cooling gas to the chemicals in the storage part wherein the nozzle is installed in the bottom surface of the cover.
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