| 摘要 |
An apparatus for weighing chemicals of wet process equipment is provided to remarkably increase weighing precision by simply enabling a plurality of weighing processes. Chemicals for wet process are supplied to a bath(110) by a first line(210) wherein a wet treatment is performed on a substrate in the bath. A second line(230) is branched from the first line. A weighing member(240) receives and stores the chemicals transferred along the second line, installed in the second line. A switch valve part(220) switches and transfers the chemicals transferred along the first line to the bath or the weighing member. The switch valve part can include a first valve(221) installed in the rear part of the branch position of the first line and a second valve(222) installed in the front part of the weighing member of the second line. The first valve controls the transfer of the chemicals supplied to the bath. The second valve controls the transfer of the chemicals supplied to the weighing member.
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