| 摘要 |
A system for manufacturing an organic-inorganic hybrid conductive ultra-thin film is provided to improve coatability and quality of the liquid phase material by flatly transferring the liquid phase material while squeezing a liquid phase material adhered to a surface of a polyimide film, smoothly transfer the polyimide film while maintaining its original state without extending the polyimide film, and improve quality of a product by preventing the film from slipping through intermediate auxiliary power rollers. A system(1) for manufacturing an organic-inorganic hybrid conductive ultra-thin film comprises an uncoiler part(2) for supplying a polyimide film(A), a degreasing and washing process part(3), an etching process part(4) including a first etching process part(4-1) and a second etching process part(4-2), a neutralizing process part(5), a coupling process part(6), a catalyst adding process part(7), a bottom plating process part(8), a plating process part(9), a drying process part(10), a coiler part(11), and a plurality of upper transfer rollers and lower transfer rollers(23) repeatedly installed on apparatus frames(20) that form the respective process parts, wherein: upper transfer roller units(100) having squeezing units formed at inlet sides thereof, and the lower transfer rollers are repeatedly installed in upper and inner parts of the respective apparatus frames of the degreasing and washing process part, the etching process part, the neutralizing process part, the coupling process part, the catalyst adding process part, the bottom plating process part, and the plating process part; and intermediate auxiliary power unit parts(200) are optionally installed between the respective process parts to transfer the polyimide film smoothly such that the polyimide film is prevented from slipping while adjusting tension of the polyimide film.
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