| 摘要 |
A heating apparatus is provided to uniformly heat a material attached to a heating surface by improving cracking of a heating surface. A substrate is made of a ceramic having a heating surface. A heating body is buried in the ceramic substrate(11). A heating apparatus(10) having a thermal conductive member(14) is formed between the heating surface and the heating body in the ceramic substrate wherein the heat conductivity of the thermal conductive member is higher than that of the ceramic substrate. The thermal conductive member can be a member formed by thermo-compression. The thermal conductive member can function as an RF electrode.
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