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发明名称
Device for removing powder in semiconductor equipment exhaust line
摘要
申请公布号
KR100840481(B1)
申请公布日期
2008.06.20
申请号
KR20060123560
申请日期
2006.12.07
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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