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发明名称
APPARATUS FOR PHYSICAL VAPOR DEPOSITION
摘要
申请公布号
KR100840466(B1)
申请公布日期
2008.06.20
申请号
KR20060114910
申请日期
2006.11.21
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
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代理人
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地址
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