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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	KR100840426(B1)	申请公布日期	2008.06.20
申请号	KR20060091517	申请日期	2006.09.21
申请人		发明人
分类号	H01L21/68;B08B3/04;H01L21/304;H01L21/67;H01L21/677	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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