| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method capable of forming a phosphor layer with no adhesion of foreign substances in an evaporation start surface in the manufacture of planar radiation image detector in which the phosphor layer is formed by vacuum evaporation. <P>SOLUTION: As a shutter for blocking a vapor of a deposition material from an evaporation source, a shutter is used, which has a size larger by a prescribed size than a size in which a movement error of the shutter is added to diffusion of the evaporation material. Further, in accordance with the time T regarding the evaporation of all the deposition material from a time point when the temperature of the deposition material becomes the melting point +10°C, the evaporation is started after 0.1T from the time point when the deposition material is at the temperature and the deposition is completed before 0.9T, thereby solving the problems. <P>COPYRIGHT: (C)2008,JPO&INPIT |
