| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the manufacturing system for solar cell panel free from film separation in manufacturing process, and provide the manufacturing method of the solar cell panel. <P>SOLUTION: A temperature difference among the average temperature of a substrate immediately before being supplied into a laser etching device for photoelectric conversion layer, cleaning water temperature in a substrate cleaner immediately before a laser etching device for transparent electrode layer and the cleaning water temperature of the substrate cleaner immediately before a laser etching device for a rear electrode layer is specified not to be larger than±10°C. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
