发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 This invention discloses a semiconductor device including an insulating film having a recess therein; an electric conductor formed inside the recess; a manganese silicate film formed on an upper surface of the conductor, the manganese silicate film being formed of a reaction product of a manganese with a silicon oxide insulating film. A method for manufacturing such a semiconductor device is also described.
申请公布号 US2008142974(A1) 申请公布日期 2008.06.19
申请号 US20060561590 申请日期 2006.11.20
申请人 ARAKAWA SHINICHI 发明人 ARAKAWA SHINICHI
分类号 H01L23/52;H01L21/44 主分类号 H01L23/52
代理机构 代理人
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