| 摘要 |
An electric inspecting apparatus and a manufacturing method thereof are provided to keep flatness of the first surface of a first substrate uniform by sufficiently reducing bending of the first substrate. In an electric inspecting apparatus(100), a first substrate(10) has a first surface(10a) having a probe tip(12) contacting with an object and a second surface(10b) facing the first surface and having pads(14) receiving an electric signal applied by contacting with the object. A second substrate(16) is positioned to face the second surface of the first substrate, to receive the electric signals applied from the pads, respectively. A connecting unit(25) is vertically positioned between the first and second substrates. The section of a part of the connecting unit contacting with each pad is flat. The connecting unit surface-contacts with each pad in connecting the first and second substrates electrically. The connecting unit comprises a first connecting part(21) coupled with the first substrate and a second connecting part(23) coupled with the second substrate. The connecting unit electrically connects the first and second substrates by forcibly fitting the first and second connecting parts. |
