| 发明名称 |
Electrochemical etching assembly has drive unit in frame above electrochemical vat |
| 摘要 |
<p>An electrochemical etching process has a high torque electric motor drive installed at a suitable high point within a high frame. The frame is located over a chemical vat receiving the appropriate chemical ingredients.</p> |
| 申请公布号 |
DE102006062031(B3) |
申请公布日期 |
2008.06.19 |
| 申请号 |
DE20061062031 |
申请日期 |
2006.12.29 |
| 申请人 |
ADVANCED MICRO DEVICES INC. |
发明人 |
PIETZNER, MICHAEL;ILLGEN, MARIO;SIURY, KERSTIN;KUECHENMEISTER, FRANK |
| 分类号 |
H01L21/3063;C25D17/00;C25D21/12;C25F3/12 |
主分类号 |
H01L21/3063 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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