| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein it is difficult to uniformize the resistance value, outer shape, and temperature coefficient of a sensing wire and the detection precision of angular velocity decreases since hot wires are provided in a tensioned state at two or four locations and respective sensing wires H1-H4 are formed each in a conventional gas rate sensor. SOLUTION: At the upper portion of an electrode holder 5, a first electrode 11 arranged opposite to a center region in a nozzle hole 4a for guiding a gas flow 3, and second and third electrodes 12, 13 arranged separately mutually with the first electrode 11 as a center on a straight line passing through the first electrode 11 are implanted, and hot wires are implanted linearly at the first to third electrodes 11-13. The first and second sensing wires H1, H2 are formed by dividing the hot wires between the first and second electrodes 11, 12, and between the first and third electrodes 11, 13. COPYRIGHT: (C)2008,JPO&INPIT
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