| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for observing cross sectional for an organic film, using a scanning electron microscope, capable of observing clearly a cross-sectional state of the organic film comprising an organic substance formed on a base material such as a film and paper, by the scanning electron microscope, and capable of obtaining accurately information of the film thickness, shape and the like of the organic film. SOLUTION: This cross-sectional observation method is for observing the cross-sectional state of the organic film, comprising the organic substance positioned in the uppermost surface. In the method, a metal film, comprising metal having an electron beam emission amount larger than that of the organic substance constituting the organic film, when irradiated with an electron beam, is formed on an organic film surface, and is embedded thereafter with resin, a cross section is cut out thereafter, and the cross section is observed by the scanning electron microscope. COPYRIGHT: (C)2008,JPO&INPIT
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