发明名称 RELAXED SILICON GERMANIUM SUBSTRATE WITH LOW DEFECT DENSITY
摘要 A structure for an integrated circuit is disclosed. The structure includes a crystalline substrate and four crystalline layers. The first crystalline layer of first lattice constant is positioned on the crystalline substrate. The second crystalline layer has a second lattice constant different from the first lattice constant, and is positioned on said first crystalline layer. The third crystalline layer has a third lattice constant different than said second lattice constant, and is positioned on said second crystalline layer. The strained fourth crystalline layer includes, at least partially, a MOSFET device.
申请公布号 US2008142842(A1) 申请公布日期 2008.06.19
申请号 US20080038091 申请日期 2008.02.27
申请人 发明人 LIN CHUN CHICH;YEO YEE-CHIA;HUANG CHIEN-CHAO;WANG CHAO-HSIUNG;CHANG TIEN-CHIH;HU CHENMING;YANG FU-LIANG;CHEN SHIH-CHANG;LIANG MONG-SONG;YAO LIANG-GI
分类号 H01L29/04 主分类号 H01L29/04
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