发明名称 |
Verdampfungseinrichtung für sublimierende Materialien |
摘要 |
<p>The vaporization arrangement (2) includes at least one pan (3) for receiving a material (4) to be vaporized. A heating device is provided with number of heating rods (5) that are placed above the pan. The heating rods are arranged in a housing formed by a lid and the pan, and supported at both sides in a support ring (6) made of a high-temperature ceramic.</p> |
申请公布号 |
DE502004007046(D1) |
申请公布日期 |
2008.06.19 |
申请号 |
DE20045007046T |
申请日期 |
2004.03.03 |
申请人 |
APPLIED MATERIALS GMBH & CO. KG |
发明人 |
KLEMM, GUENTER;HERZOG, JENS;LOTZ, HANS-GEORG DR. |
分类号 |
C23C14/24;C23C14/26;C23C14/28 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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