发明名称 Verdampfungseinrichtung für sublimierende Materialien
摘要 <p>The vaporization arrangement (2) includes at least one pan (3) for receiving a material (4) to be vaporized. A heating device is provided with number of heating rods (5) that are placed above the pan. The heating rods are arranged in a housing formed by a lid and the pan, and supported at both sides in a support ring (6) made of a high-temperature ceramic.</p>
申请公布号 DE502004007046(D1) 申请公布日期 2008.06.19
申请号 DE20045007046T 申请日期 2004.03.03
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 KLEMM, GUENTER;HERZOG, JENS;LOTZ, HANS-GEORG DR.
分类号 C23C14/24;C23C14/26;C23C14/28 主分类号 C23C14/24
代理机构 代理人
主权项
地址