发明名称 NONVOLATILE STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>Provided is a nonvolatile storage device having advantages for miniaturization, a small initial threshold value variance, high write efficiency, with no erasure failure and storage failure. The nonvolatile storage device is provided with a laminated film, which is arranged to extend from between a semiconductor substrate and a gate electrode to over at least a surface on the side of a first impurity diffusion region on the gate electrode, and is provided with a charge accumulating layer and a tunnel insulating film in this order from the gate electrode side.</p>
申请公布号 WO2008072692(A1) 申请公布日期 2008.06.19
申请号 WO2007JP74024 申请日期 2007.12.13
申请人 NEC CORPORATION;TSUJI, YUKIHIDE 发明人 TSUJI, YUKIHIDE
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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