| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner that exposes a substrate while filling the gap between a projection optical system and the substrate with liquid, and has improved transfer precision. <P>SOLUTION: The aligner locally fills the portion between a final lens 31 of the projection optical system 30 and a body 40 to be exposed to with liquid LW for exposing the body via the liquid. There is a chamber 104 having uniform pressure for nearly uniformizing pressure between a collection port 103 for collecting the liquid and piping 92 for collection. The liquid collection piping 92 is connected to the chamber having uniform pressure slantwise. Further, there is a partition for dividing the chamber having uniform pressure substantially. <P>COPYRIGHT: (C)2008,JPO&INPIT |
