| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser device for an exposure system which can inject most of seed light from a narrow-band master oscillator laser into an amplification stage laser. <P>SOLUTION: In an injection synchronization type discharge-excited laser device comprising a narrow-band master oscillator laser (MO) 10 and a power oscillator laser (PO) 20 having an oscillator arranged therein, a beam line condensing device 5 is provided between the narrow-band master oscillator laser (MO) 10 and the power oscillator laser (PO) 20. The beam line condensing device 5 condenses the seed light into a beam line and directs the condensed beam onto an injection part (a plane including the mirror surfaces of the resonator or an injection mirror surface provided between the resonator mirrors) within the resonator of the power oscillator laser (PO) 20. Consequently, most of the seed light from the narrow-band master oscillator laser (MO) 10 can be used as the injection light to the power oscillator laser (PO), and a seed light injection efficiency can be increased. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
