发明名称 SUPERCONDUCTING OXIDE MULTILAYER THIN FILM ON SAPPHIRE SUBSTRATE AND ITS PRODUCTION PROCESS
摘要 PROBLEM TO BE SOLVED: To provide a thin film of high temperature superconducting oxide (RE)Ba<SB>2</SB>Cu<SB>3</SB>O<SB>7</SB>(RE=Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Yb) (hereinafter, referred to (RE)BCO thin film) having a high critical current density and causing no cracking, and to provide its fabrication process. SOLUTION: On the buffer layer of a sapphire single crystal substrate having a buffer layer, a thin film of high temperature superconducting oxide (RE)BCO into which 1% or more of cavities are introduced is provided through an intermediate thin film of (RE')Ba<SB>2</SB>Cu<SB>3</SB>O<SB>7</SB>where RE' different from RE of the (RE)BCO thin film is selected. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008140789(A) 申请公布日期 2008.06.19
申请号 JP20060322439 申请日期 2006.11.29
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 DEVELOS KATHERINE;YAMAZAKI HIROFUMI
分类号 H01L39/24;B32B18/00;C01G1/00;C23C14/08;C30B23/08;C30B29/22;H01B12/06;H01B13/00 主分类号 H01L39/24
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