SELF CALIBRATING DUAL DIAPHRAGM PRESSURE SENSOR

摘要

A pressure sensor having a predetermined chamber dome angle with an electrode. A hole (23) is located in the top to provide pressure readings and the bottom has an input port (25). A primary diaphragm (17) is coated on both sides with an electrode and an insulator. A secondary diaphragm (19) is coated on the side which faces the primary diaphragm. Offset holes (27, 29) are made in the two diaphragms. (17, 19) which permits pressure equalization during self calibration. Both diaphragms (17, 19) are initially energized to seal the gage volume, and then the secondary diaphragm' is used to self calibrate using a.known pressure.