| 摘要 |
A pulsed laser deposition apparatus and a method for forming magnetic nano dot arrays using the same are provided to freely change a magnetic property of a composite metal nano dot array by using a single target. A pulsed laser deposition apparatus includes a substrate(190), a target(180), a target holder(160), a vacuum chamber(150), and an optical source(110). The substrate is a block copolymer template, on which a nano dot array pattern is formed. The target contains a material for a film to be formed on the substrate. The target holder mounts the target. The vacuum chamber receives the substrate, the target, and the target holder therein. The optical source emits a laser beam for vaporizing the material of the target. Plural metal layers with different kinds are formed on the same surface of the target.
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