发明名称 PHASE CHANGE MEMORY DEVICE INCLUDING RESISTANT MATERIAL AND METHOD OF FABRICATING THE SAME
摘要 A phase change memory device includes a lower electrode provided on a substrate, an interlayer insulating layer including a contact hole exposing the lower electrode, and covering the substrate, a resistant material pattern filling the contact hole, a phase change pattern interposed between the resistant material pattern and the interlayer insulating layer, and extending between the resistant material pattern and the lower electrode, wherein the resistant material pattern has a higher resistance than the phase change pattern, and an upper electrode in contact with the phase change pattern, the upper electrode being electrically connected to the lower electrode through the phase change pattern.
申请公布号 US2008142777(A1) 申请公布日期 2008.06.19
申请号 US20070762801 申请日期 2007.06.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK YOUNG-LIM;CHO SUNG-LAE;BAE BYOUNG-JAE;LEE JIN-IL;PARK HYE-YOUNG;LIM JI-EUN
分类号 H01L47/00;H01L21/06 主分类号 H01L47/00
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