发明名称 |
SUBSTRATE MOUNTING TABLE AND METHOD FOR MANUFACTURING SAME, SUBSTRATE PROCESSING APPARATUS, AND FLUID SUPPLY MECHANISM |
摘要 |
A substrate mounting table includes a plate shaped member provided with a mounting surface for mounting a substrate thereon, a plurality of gas injection openings opened on the mounting surface to supply a gas toward the mounting surface, and a gas supply channel for supplying the gas through the gas injection openings; and a thermally sprayed ceramic layer covering the mounting surface. At least inner wall portions of the gas supply channel are formed in curved surface shapes, the inner wall portions facing the gas injection openings.
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申请公布号 |
US2008142160(A1) |
申请公布日期 |
2008.06.19 |
申请号 |
US20070954832 |
申请日期 |
2007.12.12 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
UEDA TAKEHIRO;KOBAYASHI YOSHIYUKI;OOHASHI KAORU |
分类号 |
H01L21/3065;B21D53/00;C23C16/40;C23C16/458 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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