| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for cleaning a slit nozzle for coating, each of which is used for cleaning a coating liquid stuck to a discharge port surface of the slit nozzle and the surface adjacent to the discharge port surface and in each of which the stuck and staying coating liquid or a dried and fixed material of the stuck and staying coating liquid can be removed easily in a short time. SOLUTION: The slit nozzle for coating has a discharge port 27, which is used for discharging the coating liquid and extended to one direction, in the longitudinal direction of the slit nozzle 20, the discharge port surface 26 and the surface adjacent to the discharge port surface. The method for cleaning the slit nozzle for coating comprises the steps of: scanning a first cleaning member to the longitudinal direction of the slit nozzle for coating while bringing the first cleaning member into contact with both of the discharge port surface and the surface adjacent to the discharge port surface to remove the coating liquid stuck to both of the discharge port surface and the surface adjacent to the discharge port surface; and scanning a second cleaning member having a long fabric material in the longitudinal direction of the slit nozzle for coating while bringing the second cleaning member into contact with only the surface adjacent to the discharge port surface to remove the coating liquid stuck to/staying on the surface adjacent to the discharge port surface. COPYRIGHT: (C)2008,JPO&INPIT
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