| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramics burning tool material for electronic components which comprises a dense film, is excellent in thermal shock resistance, does not form cracks, fractures and debonding, and can be used repeatedly. <P>SOLUTION: The tool material comprises a substrate, at least one intermediate layer formed on the substrate by an aerosol deposition method, and a surface layer of zirconia formed on the intermediate layer by an aerosol deposition method. The difference of the coefficients of linear thermal expansion between the substrate and the surface layer is 3×10<SP>-6</SP>/K or more. The intermediate layer has a coefficient of linear thermal expansion which falls between the coefficient of linear thermal expansion of the substrate and that of the surface layer. <P>COPYRIGHT: (C)2008,JPO&INPIT |
