| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device arranged to reduce an influence of an electromagnetic motor on an electromagnetic actuator without employing a ferromagnetic shield. <P>SOLUTION: In a stage device and a lithographic device provided with such a stage device, the stage device includes an electromagnetic motor arranged to move an object table, an electromagnetic actuator configured to position the object table, and a device constructed to supply an electric current to the stage device so that in use, the electric current will at least partially compensate the electromagnetic actuator for an influence of a stray magnetic field generated by the electromagnetic motor. <P>COPYRIGHT: (C)2008,JPO&INPIT |
