摘要 |
PROBLEM TO BE SOLVED: To downsize an occupied area of a spiral inductor, and to enhance a strength of the spiral inductor for an external force. SOLUTION: A semiconductor device related to this invention comprises the spiral inductor and the other circuit provided on an identical semiconductor substrate. The spiral inductor has a first conductive film pattern and a second conductive film pattern mutually split with the first and the second conductive film pattern serially connected, and a high-resistance wiring having a resistance higher than that of the first and the second conductive film pattern. COPYRIGHT: (C)2008,JPO&INPIT
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