| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron detector using a micro channel plate (MCP) whose life becomes longer by preventing the deterioration of sensitivity. SOLUTION: An analyzer 1 to analyze a specimen W by irradiating the specimen W with an electron beam EB and detecting a secondary electron SE emitted from the specimen W comprises a micro channel plate 151, a detector 152 to detect the electron SE amplified by the micro channel plate 151, and a secondary electron control means 2 for applying an electric field to the secondary electron SE emitted from the specimen W and controlling the orbit of the secondary electron SE. COPYRIGHT: (C)2008,JPO&INPIT
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