Calibration method for template writer, involves measuring existing deformation of former template during writing former template structure of former template with template writer, and distortion of former written template is also measured

摘要

The calibration method involves measuring the existing deformation of a former template during writing a former template structure of the former template with a template writer. The distortion of the former written template is measured to measure the distortion of the existing structure and deformation of the former template. The deformation of the former template is measured in the mounting of an exposure device. The correction of the template writer is compensated during writing a latter template structure of a latter template.