PROBE STATION AND TESTING METHOD FOR A WAFER USING THE SAME

摘要

A probe station and a testing method for a wafer using the same are provided to improve accuracy of wafer position, and to prevent wafer damage owing to sliding of the wafer. A wafer is disposed on a chuck which has a penetration hole passing through vertically to the upper plane. A plurality of support pins(200) are located at the lower part of the chuck, respectively comprises vacuum holes passing through the top and bottom ends. A vacuum device(300) adheres the wafer to the top end of the plural support pins by configuring the inner side of the plural vacuum hole as a vacuum state.