ALUMINIUM DOPED ZINC OXIDE TARGET AND MANUFACTURING METHOD OF PRODUCING THE SAME

摘要

An aluminum-doped zinc oxide target and a manufacturing method thereof are provided to enhance quality of an aluminum-doped zinc oxide layer by maximizing an aluminum doping effect. A slurry preparation process is performed to prepare a mixture of a slurry state including zinc oxide powders and an alumina sol(S11,S12,S13). A grain forming process is performed to form granular powders by injecting and drying the mixture of the slurry state(S14,S15). A molding process is performed to form a mold by molding the granular powders(S16). A sintering process is performed to sinter the mold(S17). The slurry preparation process includes a process for preparing a first mixture of the zinc oxide powders, the alumina sol, a dispersant, and water, and a process for preparing a second mixture of the slurry state by wet-milling the first mixture.