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发明名称
Verfahren zum Ausbilden von Silizid
摘要
申请公布号
DE112006000234(T5)
申请公布日期
2008.06.19
申请号
DE200611000234T
申请日期
2006.01.27
申请人
INFINEON TECHNOLOGIES AG
发明人
LIM, CHAN;MOON, BUM-KI
分类号
H01L21/283;H01L21/336
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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