发明名称 |
DOUBLE-SIDE GRINDING DEVICE, AND BRUSH AND DRESSER USED THEREFORE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double-side grinding device capable of efficiently, economically performing high-quality double-side grinding. <P>SOLUTION: A brush storing part 180 and a dresser storing part 190 are provided in the vicinity of a grinding device main body 110. The brush storing part 180 is stored with a plurality of brushes, while the dresser storing part 190 is stored with a plurality of dressers. The brushes and dressers move in the same way as a carrier between upper and lower rotating surface plates of the grinding device main body 110 to respectively perform cleaning and leveling of abrasive cloth respectively mounted on the opposed surfaces of the upper and lower rotating surface plates of the grinding device main body 110. A workpiece transfer part 170 which transfers a workpiece 400 and a carrier 500 from and to the grinding device main body 110 also transfers the brushes and dressers from and to the grinding device main body 110. Accordingly, the brushes and dressers efficiently, economically perform frequent processing of the abrasive cloths, and the quality of grinding improves. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008137153(A) |
申请公布日期 |
2008.06.19 |
申请号 |
JP20080015996 |
申请日期 |
2008.01.28 |
申请人 |
SUMITOMO METAL FINE TECHNOLOGY CO LTD;SUMCO CORP |
发明人 |
HORIGUCHI AKIRA;ISOBE TAKESHI;TANAKA HEIGO |
分类号 |
B24B37/04;B24B37/08;B24B53/017;B24B53/02;H01L21/304 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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