| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transportation system allowing the precise inspection of wafers or the like to be performed in manufacturing in line without largely changing a manufacturing process. SOLUTION: A test piece transportation system is used for a manufacturing process of semiconductor test pieces W such as wafers, and provided with a transportation mechanism 2 for transporting the semiconductor test piece W from one process location to the other process location and an SEM 3 provided on a transportation path of the transportation mechanism 2. The system is formed in such a manner as to temporarily stop the transfer of the semiconductor test piece W by the transportation mechanism 2 at an analyzing position P that is set in the transportation path and perform analyzing inspection by the SEM 3 at the stopping time. COPYRIGHT: (C)2008,JPO&INPIT
|
