发明名称 Thin passivation layer on 3D devices
摘要 Embodiments of the invention include a device with stacked substrates. Conducting interconnecting structures of one substrate are bonded to conducting interconnecting structures of another substrate. A passivating layer may be on the conducting interconnecting structures between the substrates and may be formed by an atomic layer deposition process or a with a Langmuir-Blodgett technique.
申请公布号 US2008142991(A1) 申请公布日期 2008.06.19
申请号 US20080070743 申请日期 2008.02.20
申请人 发明人 WONG LAWRENCE;KLOSTER GRANT;FOLEY LAWRENCE
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
主权项
地址