发明名称 |
Z OFFSET MEMS DEVICES AND METHODS |
摘要 |
A microelectromechanical system (MEMS) device with a mechanism layer and a base. The top surface of the base is bonded to the mechanism layer and defines a gap in the top surface of the base. A portion of the mechanism layer is deflected into the gap until it contacts the base, and is bonded to the base.
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申请公布号 |
US2008142913(A1) |
申请公布日期 |
2008.06.19 |
申请号 |
US20060610050 |
申请日期 |
2006.12.13 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
FOSTER MICHAEL J.;ZHOU SHIFANG |
分类号 |
H01L21/50;H01L45/00 |
主分类号 |
H01L21/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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