发明名称 Cold Cathode Pressure Sensor
摘要 The invention relates to a cold cathode pressure sensor comprising a gastight housing having a test gas inlet, an anode and a cathode arranged in said housing, and a radiation source directed to said cathode for igniting a cold cathode discharge. Said housing is at least partly made of glass. Said radiation source is arranged outside said housing and irradiates said cathode through the housing glass. Said radiation source substantially emits a radiation of a wavelength of more than 350 nm and less than 1,400 nm.
申请公布号 US2008142710(A1) 申请公布日期 2008.06.19
申请号 US20060885719 申请日期 2006.03.02
申请人 INFICON GMBH 发明人 WETZIG DANIEL;GERDAU LUDOLF
分类号 G01N23/00 主分类号 G01N23/00
代理机构 代理人
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