发明名称 Method For Slicing A Multiplicity Of Wafers From A Workpiece
摘要 A multiplicity of wafers are sliced from a workpiece which has a longitudinal axis and a cross section, the workpiece fastened on a table being fed by a relative movement directed perpendicularly to the longitudinal axis of the workpiece between the table and the wire gang of a wire saw, with a variable forward feed rate through the wire gang formed by a sawing wire moved with an effective speed, the effective speed of the sawing wire being regulated as a function of the forward feed rate and the workpiece cross section so as to result in uniform wear of the sawing wire.
申请公布号 US2008141994(A1) 申请公布日期 2008.06.19
申请号 US20070953892 申请日期 2007.12.11
申请人 SILTRONIC AG 发明人 SKOVGAARD-SOERENSEN FRANK;MAHNKE MATTHIAS;KASINGER THOMAS
分类号 B28D1/02 主分类号 B28D1/02
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