发明名称 |
SEMICONDUCTOR DEVICES WITH SEALED, UNLINED TRENCHES AND METHODS OF FORMING SAME |
摘要 |
A semiconductor device includes unlined and sealed trenches and methods for forming the unlined and sealed trenches. More particularly, a superjunction semiconductor device includes unlined, and sealed trenches. The trench has sidewalls formed of the semiconductor material. The trench is sealed with a sealing material such that the trench is airtight. First and second regions are separated by the trench. The first region may include a superjunction Schottky diode or MOSFET. In an alternative embodiment, a plurality of regions are separated by a plurality of unlined and sealed trenches.
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申请公布号 |
WO2008022074(A3) |
申请公布日期 |
2008.06.19 |
申请号 |
WO2007US75810 |
申请日期 |
2007.08.13 |
申请人 |
ICEMOS TECHNOLOGY CORPORATION;ANDERSON, SAMUEL;SO, KOON, CHONG |
发明人 |
ANDERSON, SAMUEL;SO, KOON, CHONG |
分类号 |
H01L29/812 |
主分类号 |
H01L29/812 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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