| 摘要 |
A gate valve of a semiconductor manufacture apparatus is provided to open and close an inlet stepped with a valve unit coupled to an end of a shaft by using a pneumatic actuator in a normal close method. An inlet is formed at a side of a valve body(10). A stepped outlet is formed at the other side of the valve body. The outlet passes through the valve body vertically. Inner circumferences of a lower portion and an upper portion of the outlet are different from each other. The upper portion of the outlet and an upper end of the inlet are communicated with each other. An actuator(20) is coupled to an upper surface at the outlet of the valve body. The actuator puts in/out a shaft(24) at the outlet. A valve unit(30) is coupled to a withdrawal end of the shaft at the actuator. The valve unit opens and shuts the stepped part of the outlet by performing incoming and outgoing operations of the shaft. The actuator is comprised of a body(21), a spring(22), a cap(23) and the shaft. The body is coupled to the valve body.
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