发明名称 METHODS AND APPARATUS FOR ALIGNING AN ETALON WITH A PHOTODIODE ARRAY
摘要 A method and apparatus are disclosed for measuring a characteristic, e.g. spectral bandwidth, of a light beam. The apparatus may comprise an etalon for generating an interference pattern having at least one light cone, an arrangement of detector elements, the arrangement receiving a portion of the light cone and producing a signal indicative of the characteristic; and an auxiliary detector positioned to receive a portion of the light cone and produce a signal indicative of an alignment between the etalon and the linear arrangement.
申请公布号 WO2007146337(A3) 申请公布日期 2008.06.19
申请号 WO2007US13876 申请日期 2007.06.11
申请人 CYMER, INC.;RAFAC, ROBERT, J. 发明人 RAFAC, ROBERT, J.
分类号 G01B9/02;G01J3/45 主分类号 G01B9/02
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