METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING HARDMASK,申请号KR20060120793-传众专利搜索

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发明名称	METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING HARDMASK
摘要
申请公布号	KR100838395(B1)	申请公布日期	2008.06.13
申请号	KR20060120793	申请日期	2006.12.01
申请人		发明人
分类号	H01L21/28;H01L21/027	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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