发明名称 TUBULAR TARGET
摘要 A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 mug/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 mum and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.
申请公布号 KR100838410(B1) 申请公布日期 2008.06.13
申请号 KR20067021961 申请日期 2006.10.23
申请人 发明人
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
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