| 摘要 |
<p>A method for manufacturing a back contact of a CI(G)S(Copper-Indium-Gallium-Selenide) solar cell is provided to enhance a sodium diffusion effect by changing pressure of reaction gas in a sputtering process. A solar cell includes a back contact having a CI(G)S light-absorbing layer. A method for manufacturing the back contact of the solar cell having the CI(G)S light-absorbing layer includes a process for forming a first conductive layer on a substrate by performing a DC sputtering process under a relatively high-pressure reaction gas, and a process for forming a second conductive layer on the first conductive layer by applying an RF bias to the substrate and performing the DC sputtering process under a relatively low-pressure reaction gas.</p> |
