| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge method in which the discharge amount can be controlled with high precision. SOLUTION: The method for discharging a liquid droplet of a functional liquid to a workpiece from a nozzle of a liquid droplet discharge head comprises: a preliminary discharge step S6 of discharging the liquid droplet to a preliminary discharge area from the nozzle and heating the nozzle; a measurement discharge step S8 of discharging the liquid droplet to a discharge amount measuring part from the nozzle; measurement steps S7, S9 of measuring the amount of the functional liquid to be discharged from the liquid droplet discharge head by the discharge amount measuring part; a discharge amount adjustment step S10 of adjusting the amount of the liquid droplet to be discharged from the nozzle; and a plotting step S11 of discharging the liquid droplet to the workpiece from the nozzle. At the preliminary discharge step S6, the discharge of the liquid droplet is continued until the nozzle temperature becomes almost same as the plotting nozzle temperature being the nozzle temperature at the plotting step S11. COPYRIGHT: (C)2008,JPO&INPIT
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